Siberian Federal University 
- Issue
- Journal of Siberian Federal University. Mathematics & Physics. 2010 3 (1)
- Authors
- Efremov, Alexander V.; Ovchinnikov, Sergey G.; Varnakov, Sergey N.; Kosyrev, Nikolay N.
- Contact information
- Efremov, Alexander V. : ; , e-mail: ; Ovchinnikov, Sergey G. : ; ,; Varnakov, Sergey N. : ; ,; Kosyrev, Nikolay N. : ; ,
- Keywords
- CAD; CAD; mathematical modeling; ellipsometer; overload modeling; finite element method
- Abstract
Ellipsometer arms mounting is a part of MBE system with magneto-optic ellipsometric complex, for which the automated designing task has been examined. The ability of the limiting conditions driven design has been shown. Using CAD and mathematical modeling the optimal form of ellipsometer mounting arms was found. The acceleration that appears under typical mechanical overloads has been defined, under the condition that the maximum beam deviation of the analyzer did not exceed the admissible deviation for carrying out measurements.
- Pages
- 118-124
- Paper at repository of SibFU
- https://elib.sfu-kras.ru/handle/2311/1594
Journal of Siberian Federal University. Mathematics & Physics / Ellipsometer Mounting System Design Using CAD
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