Siberian Federal University 
- Issue
- Journal of Siberian Federal University. Engineering & Technologies. 2010 3 (4)
- Authors
- Sakun, Elena A.; Polyushkevich, Anna V.; Harlashin, Pavel A.; Semenova, Olga V.; Korets, Anatoly Ya.
- Contact information
- Sakun, Elena A. : Siberian Federal University , 79 Svobodny, Krasnoyarsk 660041 Russia , e-mail: ; Polyushkevich, Anna V. : Siberian Federal University , 79 Svobodny, Krasnoyarsk 660041 Russia; Harlashin, Pavel A. : Siberian Federal University , 79 Svobodny, Krasnoyarsk 660041 Russia; Semenova, Olga V. : Siberian Federal University , 79 Svobodny, Krasnoyarsk 660041 Russia; Korets, Anatoly Ya. : Siberian Federal University , 79 Svobodny, Krasnoyarsk 660041 Russia
- Keywords
- Porous silicon; porous structures on silicon; the microsystem engineering
- Abstract
In this article the review of experimental researches of the porous silicon structures received by electrochemical anodizing method of monocrystal silicon in fluoric acid solution is resulted. Optical and magnetic researches of porous structures are obtained.
- Pages
- 430-443
- Paper at repository of SibFU
- https://elib.sfu-kras.ru/handle/2311/1857
This work is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License (CC BY-NC 4.0).