- Issue
- Journal of Siberian Federal University. Engineering & Technologies. 2011 4 (1)
- Authors
- Yuzova, Vera A.; Levitsky, Alexsandr A.; Harlashin, Pavel A.
- Contact information
- Yuzova, Vera A. : Siberian Federal University , 79 Svobodny, Krasnoyarsk 660041 Russia; Levitsky, Alexsandr A. : Siberian Federal University , 79 Svobodny, Krasnoyarsk 660041 Russia; Harlashin, Pavel A. : Siberian Federal University , 79 Svobodny, Krasnoyarsk 660041 Russia , e-mail:
- Keywords
- porous silicon; silicon structures; silicon technology; micro- and nanoelectronics
- Abstract
Work represents the review of the researches spent within the limits of the Federal target program «Integration of a science and higher education of Russia» students and post-graduate students under a joint scientific management of teachers «Device designs and a nanoelectronics» department and employees of institute of physics of the Siberian Branch of the Russian Academy of Science in the field of actual technological directions micro- and nanoelectronics - development creation of porous silicon technology. The purpose of the given researches consists in working out of silicon materials and the structures possessing new stable properties which will allow to expand in the near future considerably a range of existing devices properties for modern microelectronics and which will promote creation of original devices.
- Pages
- 92-112
- Paper at repository of SibFU
- https://elib.sfu-kras.ru/handle/2311/2279
This work is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License (CC BY-NC 4.0).