Journal of Siberian Federal University. Engineering & Technologies / Development Technology of Creation and Research Porous Silicon

Full text (.pdf)
Issue
Journal of Siberian Federal University. Engineering & Technologies. 2011 4 (1)
Authors
Yuzova, Vera A.; Levitsky, Alexsandr A.; Harlashin, Pavel A.
Contact information
Yuzova, Vera A. : Siberian Federal University , 79 Svobodny, Krasnoyarsk 660041 Russia; Levitsky, Alexsandr A. : Siberian Federal University , 79 Svobodny, Krasnoyarsk 660041 Russia; Harlashin, Pavel A. : Siberian Federal University , 79 Svobodny, Krasnoyarsk 660041 Russia , e-mail:
Keywords
porous silicon; silicon structures; silicon technology; micro- and nanoelectronics
Abstract

Work represents the review of the researches spent within the limits of the Federal target program «Integration of a science and higher education of Russia» students and post-graduate students under a joint scientific management of teachers «Device designs and a nanoelectronics» department and employees of institute of physics of the Siberian Branch of the Russian Academy of Science in the field of actual technological directions micro- and nanoelectronics - development creation of porous silicon technology. The purpose of the given researches consists in working out of silicon materials and the structures possessing new stable properties which will allow to expand in the near future considerably a range of existing devices properties for modern microelectronics and which will promote creation of original devices.

Pages
92-112
Paper at repository of SibFU
https://elib.sfu-kras.ru/handle/2311/2279

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