Journal of Siberian Federal University. Mathematics & Physics / Technological Features Influence on Magnetic Sensitivity of Sensor Based on Ferromagnetic Structures

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Issue
Journal of Siberian Federal University. Mathematics & Physics. 2017 10 (2)
Authors
Djuzhev, Nikolay A.; Iurov, Aleksey S.; Mazurkin, Nikita S.; Chinenkov
Contact information
Djuzhev, Nikolay A.: National Research University of Electronic Technology (MIET) Shokina, 1, Moscow, Zelenograd, 124498 Russia; Iurov, Aleksey S.: National Research University of Electronic Technology (MIET) Shokina, 1, Moscow, Zelenograd, 124498 Russia; Mazurkin, Nikita S.: National Research University of Electronic Technology (MIET) Shokina, 1, Moscow, Zelenograd, 124498 Russia; Chinenkov, Maksim Y.: National Research University of Electronic Technology (MIET) Shokina sq., bld. 1, Moscow, Zelenograd, 124498 Russia;
Keywords
magnetoresistive sensor; MEMS; magnetoresistance; magnetoresistor
Abstract

Main urgent problems of the magnetic devices and primary converters development based on the mag- netoresistive structures are the sensitivity improvement and thermal stability. The sensitivity was de- termined as the ratio of the magnitude of the output signal (imbalance voltage of the bridge under the action of magnetic field) to the magnetic field magnitude on the linear range of transfer characteris- tic. The investigated structures had a wide range of sensitivity values from 3.0 (mV/V)/(kA/m) to 9.4 (mV/V)/(kA/m), in the bias field value of 1 kA/m. It is established what the main influence on the sensitivity of the sensor has a width of permalloy strips. The distance between the barber pole has a substantially smaller effect

Pages
181–185
Paper at repository of SibFU
https://elib.sfu-kras.ru/handle/2311/31578