- Journal of Siberian Federal University. Engineering & Technologies: 2018, Vol. 11, Issue 6
- Marinushkin, Pavel S.; Levitskiy, Alexey A.; Ivanov, Tzvetan; Rangelow, Ivo W.
- Contact information
- Marinushkin, Pavel S.: Siberian Federal University 79 Svobodny, Krasnoyarsk, 660041, Russia; ; Levitskiy, Alexey A.: Siberian Federal University 79 Svobodny, Krasnoyarsk, 660041, Russia; Ivanov, Tzvetan: Technische Universität Ilmena Institut für Mikro- und Nanoelektronik 1 Gustav-Kirchhoff Str., Ilmenau, 98693, Germany; Rangelow, Ivo W.: Technische Universität Ilmena Institut für Mikro- und Nanoelektronik 1 Gustav-Kirchhoff Str., Ilmenau, 98693, Germany
- Atomic Force Microscope (AFM); Nano- and Microelectromechanical Systems (NEMS/ MEMS); nanometrology; self-actuating and self-sensing cantilever; thermomechanical actuation
The development of fast, qualitative and quantitative material characterization methods is one of the most important current issues in the field of nanosystems metrology. On this evidence it seems to be important to conduct a research on the capabilities of multimode resonance imaging mode in atomic-force microscopy (AFM) that allows broadening AFM capabilities in quality of nanonscale structures metrology and nano-object image quantitative analysis. The subject of this paper is modeling of physical phenomena that arise during the creation of such systems that describes coherent mechanic and electric phenomena in self-sensing and self-actuating cantilevers operating in multi-frequency resonance mode. The outcome of the research is represented by a virtual dynamic AFM model that allows understanding the signal generation process in AFM control and measuring circuits during sample scanning in multi-frequency mode
- Paper at repository of SibFU
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